Equipment parameters | |
DJ-300 rotary cleaning machine | |
Machine size | 2000x1800x2250(mm) Reference dimensions |
Weight | 1000kg |
pressure | 6kg/cm ², with a flow rate of over 200LPM |
voltage | 50/60HZ,3P220V15KW |
rpm | 5~250RPM |
Baking temperature | Room temperature~80 ° C (IR infrared heating middle X1, outer X2, a total of three medium wavelength high-efficiency lamps) |
control system | MitsubishiPLC |
steam | DIWater3kgf/cm2 over/1’ |
exhaust | 6 "exhaust |
Applicable products | 12”Foup8”CSTBOX |
Product characteristics | Can correspond to various forms of Foup&FOSB |
(SEMI standard applies to Foup) | |
This equipment is mainly used for Foup, Fosb, Casset in semiconductor manufacturing processes | |
Equipment parameters | |
12 "Foup Special Cleaning Basket | |
Number of cleaning racks | 12 "Foup cleaning rack * 4 (capacity 8pcs) |
Cleaning rack size | 465x295x1225mm(unilateral) |
Cleaning rack material | SUS+POM |
Customized services | 8”12”CST，MASK Customization of customer supplied products |
